diff --git a/scripts/irq2nvic_h b/scripts/irq2nvic_h
index 52f12653..95728cd2 100755
--- a/scripts/irq2nvic_h
+++ b/scripts/irq2nvic_h
@@ -159,6 +159,8 @@ def main():
             os.unlink(nvic_h)
         if os.path.exists(vector_nvic_c):
             os.unlink(vector_nvic_c)
+        if os.path.exists(cmsis):
+            os.unlink(cmsis)
         sys.exit(0)
 
     if not needs_update([__file__, infile], [nvic_h, vector_nvic_c]):